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Problems with Step measure on an Innova SPM

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Monique Bandeira posted on Sun, Apr 3 2011 7:45 PM

My name is Monique and I work as a master student at the Department of Eletrical Engineering at University of Brasilia, in Brazil.

 

I'm experiencing some problems with my topographic measures when I need to measure a step on the sample.

I made polymer samples and Au samples and all of them show the same "problem" in contact or tapping mode.

 

For example: I made an Au film (using a sputtering) and then scratched it. On the board I got the following step/figure. I was expecting almost flat-step-almost flat measure, but even when I use AC only, Line Fit, Bow Rem, I still get this inclined line. It happens with the whole image. With polymers I got almost the same thing but sometimes instead of the line on both sides of the step is a curve like an exponential.  

 

Can anyone help me understand this situation?

 

 

 

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Hi Monique, for images with "steps" i.e. terraced samples, the best results are often obtained with plane fitting to ONE of the terraces. This is actually discussed in chapter 5 of my book "Atomic Force Microscopy" by Eaton and West. The chapter may help you a lot with image processing. If you show us the image s before and after processing we will probably be able to tell you just how to do it.

 

Pete.

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replied on Mon, Apr 4 2011 12:15 PM

Hi Monique,

Please send me the original datafile: stefan.kaemmer at bruker-nano.com

I will have a look and see what I can do.

Stefan

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