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Calibration Standards: electrical

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Answered (Not Verified) This post has 0 verified answers | 3 Replies | 2 Followers

posted on Thu, Jan 7 2010 9:24 PM

This talk of calibration standards has brought up another question- where to get electrical reference standards for techniques such as scanning

spreading resistance (SSRM) or scanning capacitance (SCM)?


I'm talking about a stack of layers of known doping concentration and thicknesses of epitaxially grown silicon, usually set up as a sequence of

increasing or decreasing dopant concentration.


We have some custom made samples, but I'm wondering if anybody has a commercial source?


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Answered (Not Verified) Andres replied on Tue, Aug 14 2012 8:43 AM
Suggested by Andres

Hi we have found some calibrated samples from IMEC

http://www2.imec.be/be_en/home.html

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Ben Ohler replied on Thu, Aug 16 2012 4:48 PM

Thanks Andres

Here's a link to the specific page with more information: http://www2.imec.be/be_en/collaboration/services/cams/calibration-and-resolution-qualifi.html

-Ben

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Tejasvi Parupudi replied on Wed, Sep 19 2012 11:51 AM

Are there any samples that can be used as electrical standards for scanning in liquids? 

Tejasvi Parupudi

Purdue

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