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My understanding:
2D data smoothing is a filter for calculating sample slope, unit nm, need to set lower in smaller trenches (about 5), can be left at default 7.5 at VPS, how does it or can it affect noise in images -> I mean if the scanner measures the sidewall noisy this filter wont do much? at least I can not notice it. What it the formula behind taking the past 5nm of data points into account for measuring the slope y=nx+m?
2D Data Smoothing doesn’t effect noise in images, unless you set it so low that the scan algorithm fails to correctly calculate the sample slope. A lower filter value allows the calculated slope to change more rapidly, which is important in narrow spaces.