The Nanoscale World

Soft Slope Smoothing

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Top 10 Contributor
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Bruker Employee
BrukerApplications posted on Fri, Mar 12 2010 4:22 PM

My understanding:

The soft slope smoothing is a filter for calculing sample slope, unit nm, how can I see its affect? What is the formula behind it?  Set it lower (1nm) in small trenches?

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Top 10 Contributor
143 Posts
Points 3,545
Bruker Employee

Soft Slope Smoothing filters the output of the 2DDS filter. It adds a degree of stability to the sample slope calculation.

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