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Soft Slope Smoothing

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BrukerApplications posted on Fri, Mar 12 2010 4:22 PM

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My understanding:

The soft slope smoothing is a filter for calculing sample slope, unit nm, how can I see its affect? What is the formula behind it? Set it lower (1nm) in small trenches?

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143 Posts

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BrukerApplications replied on Fri, Mar 12 2010 4:38 PM

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Soft Slope Smoothing filters the output of the 2DDS filter. It adds a degree of stability to the sample slope calculation.

Filed under: CD-AFM, Insight 3D-AFM, CDMode Parameters
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Soft Slope Smoothing

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