Forums
Bruker Media
Community Media
Bruker AFM Probes
SPM Digest
Application Notes
NanoTheater
Website
中文
Brochures & Datasheets
Publications
Probes Catalog
Events
Manuals & Documentation
Presentations
Guide to AFM Modes
News
Journal Club
Webinars & Video
Nanovations
Other
Hi,
Would it be possible to measure a 1um tall, 86° angled slope using a D3100 w/ NSIIIA? I've been told that DT or CD mode would be the only way to do this, or possibly Scanasyst mode on the Dimension, but none of these modes are accessible to the customer on their system.
Thanks,
Dave
Dave,
In general you just need a tip with a sidewall steeper than the sample; for example a fib tip may work here. There are also some asymmetric tips out there that are overhanging in one direction (including the scan angle). In either case, scan much slower than normal because of the steep sidewall. You will not resolve detail on the sidewall, but should be able to get the angle.
If the gap is *really* not an issue, you can also mount the sample on a slight, but known, angle, decreasing the angle of one side, but increasing the angle of the other (this side will become un-measureable). You can then correct offline.
Good luck,Steve
Thanks Steve. I'll let you know how it goes.
Hi Dave -
What is the Top CD? You could do this measurement on a D3100 using a post probe such as the CDP200. This probe is several um tall and as long at the bottom CD is >200nm you should be able to get the the SWA. The "postiness" of end of the CDP200 probe will minimize the amount of tip shape convolution into the sidewall so the SWA calculation should be relatively accurate.
Cheers,
Sean
Sean, I don't have specific numbers, but my understanding is that trench widths at top and bottom are not an issue.