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Tips for oxidation?

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lmign posted on Thu, Apr 7 2011 2:30 PM

Hi All,

We would like to do the local oxidation on Veeco icon AFM,

what kind of tips would you suggest?

Thanks,

 

Yiming

 

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There is a good write up in the Nanolithography manual: 013-413-000 NANOMAN VS NANOLITHOGRAPHY page 48.

From that section: Using a metal coated tapping tip, such as an SCM-PIT or MESP, engage on a clean, doped Si surface. Set the scan and feedback parameters to achieve a high quality image.

Also see for other comments on oxidation:
http://nanoscaleworld.bruker-axs.com/nanoscaleworld/forums/p/492/955.aspx#955

 

 

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Top 10 Contributor
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Verified by lmign


There is a good write up in the Nanolithography manual: 013-413-000 NANOMAN VS NANOLITHOGRAPHY page 48.

From that section: Using a metal coated tapping tip, such as an SCM-PIT or MESP, engage on a clean, doped Si surface. Set the scan and feedback parameters to achieve a high quality image.

Also see for other comments on oxidation:
http://nanoscaleworld.bruker-axs.com/nanoscaleworld/forums/p/492/955.aspx#955

 

 

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lmign replied on Fri, Apr 8 2011 9:33 AM

Hi Stephen

Thank you for your reply.

I could only find this manual online

http://nanoscaleworld.bruker-axs.com/nanoscaleworld/media/p/1212.aspx

Is this the one you are talking about?

Thanks,

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replied on Fri, Apr 8 2011 3:29 PM

Hi Imign,

Regular TappingMode tips (TESP, FESP) actually work just fine for local oxidation experiments.

 

Stefan

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I posted the relevant section here:

p48-56 ONLY - NANOMAN VS NANOLITHOGRAPHY V7-D (013-413-000).pdf

Email me if you need the entire manual.

Steve

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