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Hi All,
We would like to do the local oxidation on Veeco icon AFM,
what kind of tips would you suggest?
Thanks,
Yiming
There is a good write up in the Nanolithography manual: 013-413-000 NANOMAN VS NANOLITHOGRAPHY page 48.
From that section: Using a metal coated tapping tip, such as an SCM-PIT or MESP, engage on a clean, doped Si surface. Set the scan and feedback parameters to achieve a high quality image.
Also see for other comments on oxidation:http://nanoscaleworld.bruker-axs.com/nanoscaleworld/forums/p/492/955.aspx#955
Hi Stephen
Thank you for your reply.
I could only find this manual online
http://nanoscaleworld.bruker-axs.com/nanoscaleworld/media/p/1212.aspx
Is this the one you are talking about?
Hi Imign,
Regular TappingMode tips (TESP, FESP) actually work just fine for local oxidation experiments.
Stefan
I posted the relevant section here:
p48-56 ONLY - NANOMAN VS NANOLITHOGRAPHY V7-D (013-413-000).pdf
Email me if you need the entire manual.
Steve