Forums
Bruker Media
Community Media
Bruker AFM Probes
SPM Digest
Application Notes
NanoTheater
Website
中文
Brochures & Datasheets
Publications
Probes Catalog
Events
Manuals & Documentation
Presentations
Guide to AFM Modes
News
Journal Club
Webinars & Video
Nanovations
Other
Hi,
I saw your poster on different modes on your website (great poster!). What is critical dimension AFM? Do you have any app notes on it or more info on it? Thanks! Dalia
Hi Dalia,
Critical dimension (CD) measurements are required for quality control and process development in e.g. semiconductor industry. CD refers to parameters like linewidth at the top and bottom of a structure. Measurenments like that require the utmost stability, very specialised AFM probes, and unique scanning mechanisms. The instruments, or tools as they are often referred to, are operated in cleanroom environments in an automated fastion. I attached a link the the Bruker "Insight", an AFM tool capable of CD measurements:
http://www.bruker-axs.com/insight_3d_automated_atomic_force_microscope.html
Best,
Stefan
Hi, Dalia,
you can find the app note here:
http://nanoscaleworld.bruker-axs.com/nanoscaleworld/media/p/150.aspx
Enjoy reading!
LA
Hello Dalia -
These slides from a recent webinar provide and overview of the technology of CD-AFM, as well as automated AFM in general and a survey of the common applications for these modes.
http://nanoscaleworld.bruker-axs.com/nanoscaleworld/media/p/500.aspx
If you have any specific questions about Automated AFM, CD or DT Mode, please feel free to contact me directly:
sean.hand@bruker-nano.com
Best Regards,
Sean
Thanks to everyone for all the info - Sean's presentation was very helpful. So from what I understand, is this mainly a tapping mode technique with specialized tips to measure topography such trenches/sidewalls, etc., where the measurement is only made when you have a large height difference (thereby I assume speeding up the measurement so that it's high throughput), with tip shape deconvolution being an integral part? Does it measure something other than topography? Do I have the right gist?
Thanks,
Dalia