Scan pattern of Interleave mode

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Teddy Huang Posted: Tue, Nov 13 2012 6:56 PM

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Hi Folks,

According to the manual, Figure 1 in the section of “How Interleave Mode Works” shows the interleave raster scan patterns. According to this pattern, when the interleave mode is enabled, the slow-scan keeps going.

Then, in the measurement, the scan of the ”interleave trace and retrace” does not characterize the scan of the “main trace and retrace”. Am I right?

If I have a 5.12 um scan size on the slow-scan direction, this could be a 40 nm with a 512 sample lines. Am I right?

Thanks,

Teddy

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Teddy Huang replied on Tue, Nov 13 2012 6:57 PM

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Sorry, I mean: 

If I have a 5.12 um scan size on the slow-scan direction, this could be a 40 nm displacement with a 512-sample-line resolution. Am I right?

Sorry, cannot type Chinese for now.

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Hao Sun replied on Tue, Nov 13 2012 10:00 PM

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扫描线如手册上所示，trace与retrace并非平行，而是折线，这样慢轴在移动的时候是连续的微小移动，即0度扫描时施加在Y轴的电压是逐渐变化的。这可以避免由于施加突然变化的脉冲电压导致压电陶瓷蠕变，造成Y方向不准。可以计算一下两条线间的角度，会发现这个角度在通常的扫描设定下会很小，基本不会影响结果。sample/line不会引起错位，它只是规定了每条快扫轴上得到的数据点数，line的数目的设定才影响每条扫描线间的距离。如果设定为512条线，5.12um的图每条trace或者每条retrace的中心线相邻都是间隔10nm。因为这样会有512条trace和512条retrace。如果开了interleave，则又增加了512条interleave trace和512条interleave retrace。因此是10nm。