SPIE Update Day 1

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SeanHand Posted: Tue, Feb 23 2010 2:05 PM

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Excellent representation of AFM at SPIE on the opening day of the Metrology and Inspection section.  Both opening invited talks were centered on the Insight 3D-AFM as reference metrology.  The afternoon session opened with Chas Archies work on off axis SEM calibration/characterization using some pretty unique structures they've coined Toblers as they look like Toblerone bar set on it's side.  They use these tined lines to characterize LER performance of the SEM and once again used the Insight 3D-AFM as a reference.

Most of the rest of the afternoon covered process control methodologies rather than technological techniques.