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Profiling on DAFP trips HPC

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Top 10 Contributor
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Bruker Employee
BrukerApplications posted on Tue, Mar 9 2010 8:03 PM

While profiling on a DAFP I keep tripping HPC while profiling up a 250nm step feature.   Increasing igain from 0.3 - 2 does not seem to help.  Using standard tapping parms elsewhere.  Other advice?

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Top 10 Contributor
99 Posts
Points 958
Bruker Employee

Couple of things to check:

 

1. if you do a locate tip,  how well centered is the laser?

2. What is your sum signal?

3. Is the laser well centered in the laser window (the oval window on the left shoulder of the head,  you can see this by looking through the front window of the tool)?

 

You can take the igain up to 4 for some profiling applications,  especially on very tall features (>1um steps).  You might try that as well .

 

just a couple of baseine things to check. 

Cheers,

Sean

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