sidewall characterization with excessively tilted post probes

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Robert Melzer Posted: Thu, Nov 11 2010 7:22 AM

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Hi,

I am wondering if any of you on the automated AFM site has tried or already experience with scanning a sidewall with an excessively tilted post probe.

What do you think, would it be possible to characterize for example gate or spacer transition when using a sharp conical probe?

Cheers

Robert

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SeanHand replied on Thu, Nov 11 2010 5:36 PM

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Hi Robert -

   I have thought about this, in particular, using a 12 deg FIB on an InSight 3 deg tip mount.  In this case, you'd end up with the probe sticking out from the cantilever.  If you were to scan at 0 deg,  using an X dither of a volt or 2,  yes this might work.  I haven't really tried it with any real dedication though.  One application for this might be SiGe undercut or gate footing, (etch through).  You would of course only get the information from one sizewall so you would not be able to make any claims about CD,  just SWR and SW features. 

Cheers,

Sean

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Robert Melzer replied on Fri, Nov 12 2010 1:59 AM

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Bruker probes should still make these 12° Fibs, right? We might have some application where could try it on.