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  • Re: Scratching Lithography using Innova

    Hi, Yes there is a way. When you peform a lithography experiment selecting the "by depth" option, the system will turn the z-feedback off and raise the sample by the depth you specified. If you have tilt on your sample this can of course lead to errors in depth. In order to compensate for that...
    Posted to SPM Digest (Forum) by Anonymous on Tue, Dec 6 2011
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