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  • PFT on PSS samples?

    Hi PFTers - I'm looking at using PFT for some PSS samples on Icon. These features are tall and conical with Top SWA around 30 degrees, Mid SWA at around 45 degrees and bottom SWA around 55 degrees. My (limited!) understanding of how PFT works, is there any issue using PFT on non flat samples? I.e...
    Posted to SPM Digest (Forum) by SeanHand on Tue, Mar 9 2010
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