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Example 2: Anodic Oxidation on Silicon - From NanoMan VS Manual


posted by Stephen Minne
Fri, Apr 8 2011

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Example 2: Anodic Oxidation on Silicon - From NanoMan VS Manual

Example 2: Anodic Oxidation on Silicon
Anodic oxidation in NanoMan works well when using the TAPPING mode for imaging and the CONTACT mode for oxidation. See Figure 5ao, Page 64, in the Bitmap Import and Mode Switching example for typical path settings for anodic oxidation using this new method. Using a metal coated tapping tip, such as an SCM-PIT or MESP, engage on a clean, doped Si surface. Set the scan and feedback parameters to achieve a high quality image.

 

 

 

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