Normal
0
false
false
false
MicrosoftInternetExplorer4
Atomic force
microscopy (AFM), on the other hand, represents an excellent solution for
advanced process metrology. The Digital Instruments Dimension™ X3D Automated
Atomic Force Microscope from Veeco (see Figure 1), is able to deliver TEM-like performance
at a fraction of the cost. The X3D reduces cost per wafer pass by a factor as
high as 10 and provides a return on investment after only 500 to 1000 cross-sections
performed (i.e., by X-SEM or TEM). Furthermore, this nondestructive instrument
is designed for in-fab use for process control. Numerical results and data are available
within minutes.