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Alessandro Podestà's Announcements

Dept. of Physics, University of Milano, Italy
13 Posts
146 Points
  • Wed, Jun 15 2011
  • Accuracy of calibration grids

    Hi all,
    I have three calibration grids from Digital Instruments/Veeco/Bruker and I would like to know what reasonably are the relative x,y,z accuracies of these specimens (these are not NIST certified samples, nevertheless it should be possible, based on the way they are produced, to assess reasonably accurate accuracy figures).

    Unfortunately, I do not have specification documents for the three objects, and I could only find uncomplete or unclear information browsing around the web; so I ask the community for helping me.

    I report below what is written on the calibration grid packages.

    Many thanks and best regards
    Alessandro Podesta'

    -----------------------------
    Sample #1 (provided by Veeco 3 years ago)
    Digital Instruments
    10 um pitch
    200 nm deep
    3D reference
    P/N 498-000-026
    NGR-11010-F120
    NanoDevices

    Sample #2 (provided by Veeco 3 years ago)
    Digital Instruments/Veeco Metrology Group
    PG
    Platinum Coated
    Calibration Grid
    1um x 1um Period

    Sample #3 (provided by DI when our Multimode was installed > 10 years ago....)
    The original box has been lost.
    Specs are:
    Pitch 10 um
    Pits 180 nm
    could it be the STR10−1800P model ?

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