Hi all,
I have three calibration grids from Digital Instruments/Veeco/Bruker and I
would like to know what reasonably are the relative x,y,z accuracies of these specimens (these are not NIST certified samples, nevertheless it should be possible, based on the way they are produced, to assess reasonably accurate accuracy figures).
Unfortunately, I do not have specification documents for the three
objects, and I could only find uncomplete or unclear information
browsing around the web; so I ask the community for helping me.
I report below what is written on the calibration grid packages.
Many thanks and best regards
Alessandro Podesta'
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Sample #1 (provided by Veeco 3 years ago)
Digital Instruments
10 um pitch
200 nm deep
3D reference
P/N 498-000-026
NGR-11010-F120
NanoDevices
Sample #2 (provided by Veeco 3 years ago)
Digital Instruments/Veeco Metrology Group
PG
Platinum Coated
Calibration Grid
1um x 1um Period
Sample #3 (provided by DI when our Multimode was installed > 10
years ago....)
The original box has been lost.
Specs are:
Pitch 10 um
Pits 180 nm
could it be the STR10−1800P model ?