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Veeco Metrology Group, through its Digital Instruments and TM Microscopes divisions, offers several lines of scanning probe microscopes (SPM) capable of atomic force microscopy (AFM). Large sample stage AFMs can handle full-size MEMS wafers, and offer a range of automation options for the production fab. Small sample stage AFMs, with fewer automation
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Diminshing feature size, combined with requirements for higher throughput during quality control, have steadily increased demand for Critical Dimension Atomic Force Microscopy (CD AFM). In contrast to Scanning Electron Microscopy (SEM), the CD AFM provides a solution for nondestructive and rapid 3-dimensional measurementof features with 1.5nm 3s repeatability