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  • NANOLITHOGRAPHY MANUAL, VERSION 5.12

    This manual details NanoLithography procedures and sample programs to test your system. It also details the NanoScript™ macro language associated with NanoLithraphy. Version 5.12
    Posted to Publications (MediaGallery) by Chunzeng Li on Mon, Jan 24 2011
  • NanoLithography Support Note 316, Revision A

    This support note details NanoLithography theory, NanoScript™ syntax for performing lithography commands and procedures to test, build and run NanoLithography programs. Refer to the following sections for using your NanoLithography Package: New NanoLithography Package: Section 316.2 on Page 2 Package Contents: Section 316.2.1 on Page 2 Terms and
    Posted to Other (MediaGallery) by Stephen Minne on Tue, Jul 6 2010
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