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This manual details NanoLithography procedures and sample programs to test your system. It also details the NanoScript™ macro language associated with NanoLithraphy. Version 5.12
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This support note details NanoLithography theory, NanoScript™ syntax for performing lithography commands and procedures to test, build and run NanoLithography programs. Refer to the following sections for using your NanoLithography Package: New NanoLithography Package: Section 316.2 on Page 2 Package Contents: Section 316.2.1 on Page 2 Terms and