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  • Re: CD AFM for LER and SWR

    Hi Robert - You make very good points and determining the balance point between high resolution CD imaging, throughput and tip wear is vital to minimizing the uncertainty of these measurements. In the media section there is a document titled: Normal 0 false false false MicrosoftInternetExplorer4 CDAFM Sampling Guidelines (rev_06182008) Authored by Vladimir
    Posted to SPM Digest (Forum) by SeanHand on Tue, Jun 22 2010
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