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  • Re: SWR Analysis

    Hi Robert - For SWR analysis, a plane is fitted to and then extracted from the sidewall. All of the data points are used, there is no interpolation. You can compensate for drift by using either a 2nd or 3rd order planefit. When using a higher order planefit though, you want to make sure that you are not planefitting out actual surface topography. A
    Posted to SPM Digest (Forum) by SeanHand on Tue, Jun 22 2010
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