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  • Re: Scratching Lithography using Innova

    Hi, Yes there is a way. When you peform a lithography experiment selecting the "by depth" option, the system will turn the z-feedback off and raise the sample by the depth you specified. If you have tilt on your sample this can of course lead to errors in depth. In order to compensate for that you might want to got to tools->leveling and
    Posted to SPM Digest (Forum) by Anonymous on Tue, Dec 6 2011
  • Re: Lithography--on NanoScope IIIa

    This sort of linking error usually occurs when one of the project paths is not set up correctly. Support note 316 has a section on setting this up. A copy is available here: Nanolithography Support Note.pdf Good luck! --Bede
    Posted to SPM Digest (Forum) by Bede Pittenger on Wed, Jan 12 2011
  • Re: Lithography--on NanoScope IIIa

    Lue, Are you using Visual C++ 6.0? That is the compiler compatible with V5.30. If you are not using this version the Visual Studio project file might not be of the correct vintage. If you are, can you send me your complete system information (along with your location). I will pass this on to service, who can then check your CD image to make sure you
    Posted to SPM Digest (Forum) by Stephen Minne on Tue, Jan 11 2011
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