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Hi Igc - Some folks have success in using an oxygen plasma clean on some probe types that are contaminated with organic materials such a photoresist (notoriously bad for probe contamination). In most cases the probe shape fidelity has been maintained and been able to be put back into use. Best Regards, Sean
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Hi Robert - Trench depth is an analytical, not statistical, Nanoscope analysis that measures the depth of trenches from the top surface of a trench to either the bottom of the trench or a change in sidewall angle. This analysis was designed around measuring RC2 DRAM trenches to the top of the trench to the top of the void at which the slope of the sidewall
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Hello Dalia - These slides from a recent webinar provide and overview of the technology of CD-AFM, as well as automated AFM in general and a survey of the common applications for these modes. http://nanoscaleworld.bruker-axs.com/nanoscaleworld/media/p/500.aspx If you have any specific questions about Automated AFM, CD or DT Mode, please feel free to
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Hi Dave - What is the Top CD? You could do this measurement on a D3100 using a post probe such as the CDP200. This probe is several um tall and as long at the bottom CD is >200nm you should be able to get the the SWA. The "postiness" of end of the CDP200 probe will minimize the amount of tip shape convolution into the sidewall so the SWA
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DAFP 3D Die Map-SingleSlide.ppt Hello Imign - Our Vx and DAFP automated systems allow for what we call 3D-Die mapping, this isn't exactly what you're looking for but may get you what you need. This is a hybrid profiler/AFM application in which 512 (or more) single line profiles are stitched together to form an AFM style image. The individual
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Hi Robert - This function is not currently supported in V6 and V7. As such, it is probably best not to enable this function. Cheers, Sean
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Hi Robert - I have thought about this, in particular, using a 12 deg FIB on an InSight 3 deg tip mount. In this case, you'd end up with the probe sticking out from the cantilever. If you were to scan at 0 deg, using an X dither of a volt or 2, yes this might work. I haven't really tried it with any real dedication though. One application for
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Hi Robert - In general, yes you are correct. The easiest way to think about it is that the slope window size defines the length of a given scan line profile of the sample surface over which to determine which portion of the tip shape was interacting with the sample shape at that point, and thus to know which portion of the tip to deconvolve from the
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Good Evening Harry - Our FIB probes are conical with a very sharp end radius similar to that of a TESP. The specification on these probes is based on the width of the spike at a defined height up from the probe apex. In your case, the FIB1-100 is 100nm wide 1 um up from the probe apex, as another example, a FIB4-200 is 200nm wide 4um up from the probe
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Hi Robert - Did you have the offline planefit set to full? In V6.26 you should be able to add a flatten or planefit before the pattern rec step. -Sean