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Just saw a talk on contact hole roughness. Interesting topic and one on which we haven't really focused. Key points were the 3 sig deviation of the contact hole from round and how these spokes as they were called contributed to electrical breakdown through the dielectric to the gate line due to the excessive electric field. The measurements shown
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Excellent representation of AFM at SPIE on the opening day of the Metrology and Inspection section. Both opening invited talks were centered on the Insight 3D-AFM as reference metrology. The afternoon session opened with Chas Archies work on off axis SEM calibration/characterization using some pretty unique structures they've coined Toblers as they
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for Peak Force QNM, and modulus meas, how do you reduce contribution from underlying substrate for soft and thin films, in other words what is the limit in sample thickness, does it depend on the hardness of the film?
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What is the maximum viscosity the tapping mode can perform in? Does scan assist make the imaging easier in high viscosity fluids
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The offset tip used in HarmoniX should enhance the signal-to-noise ratio of the cantilever during tapping mode; since you went back to a more traditional probe do you create more noise in your measurements?
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Hi Eric - How far up from the apex of the probe do you need to measure? How much actual shape information do you need? If it is just a general sharpness criteria, you can use something light HSG and then monitor the roughness. Once the roughness has dropped below a certain threshold, you can consider the tip "worn".
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Answered in the application notes: COMPARISON WITH TAPPING & HARMONIX (Page 5-6).
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The streaks that you are seeing are indicates that the Tip Bottom Cutoff value is too small. Nanoscope automatically sets this value to twice the tip's vertical edge height (VEH), but sometimes this is not enough. Increasing this value allows more of the tip's full shape to be deconvolved from the image. The cutoff value is measured, in nm,
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Why not to machine in the teflon pads square recesses for, eg. 11 X 11 mm^2 mica sheets (use tight fit and corner loops at sharp angles). Then just prese mica sheets into it. It might work and will have probably the cleanest environment possible.
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I would like to ask for advice about the best epoxy to glue mica discs on teflon. I am working in liquid doing force curves and I am not sure about the cleanliness of the epoxi I am using. The issue is that the water is in contact with the epoxy and I fear some contaminants can go to the solution. The one I use works ok for imaging (phospholipid bilayers