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  • Local anoidic oxidation lithography

    Dear Sir/Madam, We would like ot know the details for executing lithography on the diInnova AFM system. We want to do local anodic oxidation of the surfaces. Can you please give me some tricks in performinglithography repeatedly and reproducibly. Thanks, Narendra
    Posted to SPM Digest (Forum) by kurra.narendra on Wed, May 11 2011
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