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Re: Local anoidic oxidation lithography

Hi Stefan, Thanks a lot for replying. I was going through the diInnova SPM manual, page 189 Nanolithography section, where I saw the anodic oxidation "chip" carrier and its connection to the stage. I am sorry, I mistyped it as "stage carrier". http://www.brukerafmprobes.com/a-3449-00-107-0142.aspx The student who uses the equipment

Posted to SPM Digest (Forum) by saumil on Mon, Nov 14 2011
Re: Local anoidic oxidation lithography

Hi, My question is related to anodic oxidation and lithography. I assume that we need the anodic oxidation stage carrier, which is not included. I would appreciate if anyone can help me with any literature/references for doing anodic oxidation or scratching 'using the diInnova'? Thanks a lot.

Posted to SPM Digest (Forum) by saumil on Fri, Nov 11 2011

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