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Hi Robert - You make very good points and determining the balance point between high resolution CD imaging, throughput and tip wear is vital to minimizing the uncertainty of these measurements. In the media section there is a document titled: Normal 0 false false false MicrosoftInternetExplorer4 CDAFM...
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Hi Robert - For SWR analysis, a plane is fitted to and then extracted from the sidewall. All of the data points are used, there is no interpolation. You can compensate for drift by using either a 2nd or 3rd order planefit. When using a higher order planefit though, you want to make sure that you are...
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Hi Robert - In both V6 and V7, the measurement location for LER is relative to the top of the feature. For example, if you have the location set to 10% and the line feature is 100nm tall, the measurement location will be 10nm down from the top of the line. Cheers, Sean
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In addition I find that it's sometimes best to have Tip Bottom Cutoff set to the same height as the tallest feature of interest. While this might not eliminate all artifacts in the post extraction image it should mean that the features you care about are properly resolved. Jason.
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Why do I have the option for random site order? When should I use this feature?