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This talk of calibration standards has brought up another question- where to get electrical reference standards for techniques such as scanning spreading resistance (SSRM) or scanning capacitance (SCM)? I'm talking about a stack of layers of known doping concentration and thicknesses of epitaxially...
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We calibrate the XYZ scan axes of our AFM using a traceable height and pitch standard made of thermally grown silicon dioxide on silicon. The specimen contains these patterns: 10 um pitch, 2-dimensional array of pits, nominally 200 nm deep 2 um pitch, 1-dimensional array of ridges, same depth as the...