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请教关于聚焦的问题

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Jachan Choi posted on Thu, Oct 10 2013 5:55 AM

孙博您好!

我们的仪器是Dmension Icon,最近经常出现一个问题:

 第一次setput并对焦到针尖后,navigate,发现焦距在针尖下约5mm地方。再次回到setup重新对焦到针尖,再navigate,焦距恢复到针尖下1mm。请问这是什么问题?谢谢!

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Verified by Jachan Choi

只要在进针前确认engage setting中的设定没有问题即可。如果是8.10的软件,建议升级到8.15. 如果已经是8.15,在engage setting中确认sample clearance是1000微米,以及SPM safety是100微米即可。

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