Lithography question

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Peter posted on Fri, Sep 13 2013 9:06 AM

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I'm doing surface scratching in the Nanoman software (Nanoscope version 8.15). Is there a way to compensate for the "X" movement of the cantilever during the indentation phase? This is implemented in the ramp mode by the parameter "X rotate". How can I compensate for the lateral movement of the tip during the indent in Nanoman or the C based Nanoscript?

All the best,

     Peter

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