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I'm currently working on some line and space MoSi features for photomask.
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What is the practical upper limit (if any) on temperature for TappingMode with a standard TESPA or RTESPA probe?
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Hi InSight Users - We have some interesting work going on with Defect Review at IBM at the moment. They are basically using the archetecture of the defect review software to generate recipes for OPC calibration. In their case, there are many many sites per wafer and are not laid out in such a way that cutting and pasting die is a convenient way to perform
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Couple of things to check: 1. if you do a locate tip, how well centered is the laser? 2. What is your sum signal? 3. Is the laser well centered in the laser window (the oval window on the left shoulder of the head, you can see this by looking through the front window of the tool)? You can take the igain up to 4 for some profiling applications, especially
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What is MIRO?
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Follow up --- What about using a non conical (i.e. cylindrical) probe for this application in PFT?
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Hi PFTers - I'm looking at using PFT for some PSS samples on Icon. These features are tall and conical with Top SWA around 30 degrees, Mid SWA at around 45 degrees and bottom SWA around 55 degrees. My (limited!) understanding of how PFT works, is there any issue using PFT on non flat samples? I.e. if the surface normal vector is not coincident with
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Hi - Here's how to teach an autoprogram: open an image add the desired analyses right click on the image node in the tree on the left side, towards the bottom of the pull down menu, you should see "create autoprogram" Cheers, Sean
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I will participating in this panel tomorrow night. Please respond if you have any ideas comments that you would like me to bring up in my opening comments (~5 minutes).
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Great panel at SPIE 2010 last night. Six panelists, 2 from research (IMEC and Univ. Tennesee), 2 from high volume manufacturing (IBM and Intel) and 2 equipment suppliers (Nanometrics and a start up, tau-Metrics). Basics of the panel discussion centered around a couple of key points How are small to mid size metrology companies to compete with larger