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Thank you Sean for your quick reply. That information helps a lot. Btw, we do not have Layers analysis available. Best Robert
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Hi, could you please explain, which algorithms are behind Z based and sidewall based trench depth analysis? Does Z based means histogramm based? We do have challenging images with etch residuals left within the trench, where we do see a dependency between trench depth reported and algorithm used. Thank you in advance. Regards, Robert
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Hi, is there a reason why "parallel autoprogram execution" is per default disabled within recipe setup of V7 or V6? Has anybody experienced some issues when having this function enabled? The SW function itself runs and saves about 1sec per site during automated recipe run.
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Bruker probes should still make these 12° Fibs, right? We might have some application where could try it on.
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Hi Sean, thanks for all the details. By reading your summary at the end, another question came up. If I want to do a repeatability study on non straight lines (e.g. spacers) where top, middle and bottom CD is of interest, it would be better to process the images with TW+VEH removal first. And then after that using linewidth analysis with tipwidth set
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Hi, I am wondering if any of you on the automated AFM site has tried or already experience with scanning a sidewall with an excessively tilted post probe. What do you think, would it be possible to characterize for example gate or spacer transition when using a sharp conical probe? Cheers Robert
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Hi, am I right that the slope window size within the TW removal analysis is a measure for the number of data points taken to calulate the sample slope after the TW is removed? (e.g. if set to 10nm, it takes all privous data points within a 10nm range back and calculates the the current slope using these data points?) Thank you for clarifying. And in
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Hi, I'd like to get your experience on thoughput of an InSight in DT mode, productin style recipes. What do you reach, and how did you manage to achieve that. Thank you Robert
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Just tested it. I guess it was my bad that I forgot to set the offline planefit for the image Thank you anyways Robert
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Hi Sean, I tried to add a flatten before the patrec - it gives you a NS error right away, the flatten analysis will be added, but it did not work with the patrec afterwards. Had the planefitt set to offset. Will try it today on a different system again. Robert