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Hi All,
We are trying to measure the distance between two features in Dimension ICON, sometimes the distance between them could be large ( around 50micron) so it will be time consuming and not accurate enough to just scan a large area ( since the maximum lines/sample we can use is 5120).
So we are thinking to measure one feature first by a scanning a much smaller area and then set the x, y offset to move the tip to another feature and do the scanning
again (in closed loop). This method seems works but we are not sure how accurate the tip position was when we set the offset.
Besides, between closed loop and adaptive, which one will be better for us in terms of measuring distance between two far away features?
Thanks a lot.
Hi Imign,
I am not sure about the accuracy you can ultimately achieve using the offset procedure that you envision. It should be relativelty straightforward for you to check it though. As for the closed-loop vs adaptive. The adaptive scan mode avoids hitting resonances and thus helps lower the sensor noise. ICON sensors are already so quiet that the effect is bascially negligable and therefore I recommend just continuing in closed-loop mode.