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SCM????

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Not Answered This post has 0 verified answers | 1 Reply | 2 Followers

Top 50 Contributor
23 Posts
Points 268
Sandeep Singh posted on Tue, Jul 17 2012 8:51 AM

Dear Sir/madam

can anyone tell how SCM data can be quantified???

If there is any literature giving information regarding quantification of SCM data..please share the link

Thanks........

SAndeep

  • | Post Points: 12

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Top 25 Contributor
55 Posts
Points 831
Bruker Employee
Reply
Chunzeng Li replied on Fri, Jul 27 2012 2:38 PM

Sandeep,

SCM data quantification has been attempted, but not with widespread success.  Here is a quote from "Scanning Probe Microscopy" Edited by Sergei Kalinin: http://www.ebooks.com/302033/scanning-probe-microscopy/kalinin-sergei-gruverman-alexei/

 I.3. Scanning Capacitance Microscopy for Electrical Characterization of Semiconductors and Dielectrics .................. 88 J. J. Kopanski

Quote:

 

"Several software packages have been developed to extract 2D dopant profiles from SCM images, including DPAK from the University of Utah [56], SCaMsim from ETH in Zurich [44], and FASTC2D from the National Institute of Standards and Technology [30]. These packages all use different models for calculating the C-V curve between the SCM tip and sample. However, they all use some variation of the calibration curve method to extract dopant profiles from SCM images."

 

"Several software packages have been developed to extract 2D dopant profiles from SCM images, including DPAK from the University of Utah [56], SCaMsim from ETH in Zurich [44], and FASTC2D from the National Institute of Standards and Technology [30]. These packages all use different models for calculating the C-V curve between the SCM tip and sample. However, they all use some variation of the calibration curve method to extract dopant profiles from SCM images."SCM images, including DPAK from the University of Utah [56], SCaMsim from ETH in Zurich [44], and FASTC2D from the National Institute of Standards and Technology [30]. These packages all use different models for calculating the C-V curve between the SCM tip and sample. However, they all use some variation of the calibration curve method to extract dopant profiles from SCM images."

 

Chunzeng

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