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Tip functionalization

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Answered (Not Verified) This post has 0 verified answers | 2 Replies | 2 Followers

posted on Fri, Jan 11 2013 2:41 AM

I got the following question from a user and was not able to answer:

Does anybody know if Si3N4 and Si probes stand Piranha treatment?

Thanks,

Alex.

  • | Post Points: 12

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Top 500 Contributor
3 Posts
Points 32
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Answered (Not Verified) meco replied on Fri, Jan 11 2013 6:38 AM
Suggested by meco

Yes, no problems at all to clean uncoated or gold-coated Si and SiN probes in Piranha. Obviously it won't be a good idea to try that on Al-coated probes.

  • | Post Points: 12
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replied on Fri, Jan 11 2013 7:58 AM

Thanks very much for the very prompt answer.

I'll tell my customer.

Best,

 

Alex.

  • | Post Points: 10
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