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I did measure LER on waveguides yesterday. A question came up
Does 'Location' in LER Analysis refer to the top or bottom?
Thank you for you help.
Hi Robert -
In both V6 and V7, the measurement location for LER is relative to the top of the feature. For example, if you have the location set to 10% and the line feature is 100nm tall, the measurement location will be 10nm down from the top of the line.
Cheers,
Sean