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LER Analysis - Measurement Location - Nanoscope Ver6 and 7

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Robert Melzer posted on Tue, Jun 22 2010 8:33 AM

I did measure LER on waveguides yesterday. A question came up

Does 'Location' in LER Analysis refer to the top or bottom?

Thank you for you help.

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Verified by SeanHand

Hi Robert -

    In both V6 and V7,  the measurement location for LER is relative to the top of the feature.  For example,  if you have the location set to 10% and the line feature is 100nm tall,  the measurement location will be 10nm down from the top of the line.



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