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SWR Analysis

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Robert Melzer posted on Tue, Jun 22 2010 11:22 AM

Could somebody explain the SWR analysis in a little bit more detail? (is it the same math as surface roughness?)

Does it use all data points between top and bottom threshold?

Can I compensate with 2nd or 3rd order planefit for drift?


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Bruker Employee

Hi Robert -

     For SWR analysis, a plane is fitted to and then extracted from the sidewall.  All of the data points are used,  there is no interpolation.  You can compensate for drift by using either a 2nd or 3rd order planefit.  When using a higher order planefit though, you want to make sure that you are not planefitting out actual surface topography.  A little a priori knowledge of the 3D waveguide shape should enable you to determine this.

  The residuals are used to calculate the 1st through 4th moments and then plotted in the line plot. The maths that are used for these calculations are the same as those used for surface roughness in the Z direction.   For reference,  these are in section 4.2.14 of the InSight Applications Manual available in the media section.

  When measuring SWA you will want to make sure that you are using a sharp probe with a very low Vertical Edge Height (VEH).  I would suggest a Trident or BiPod probe.



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