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Problem with AFM resolution/magnification

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Miezel.Talara posted on Thu, Nov 4 2010 10:09 PM

Hi!

We had a problem with our AFM. It cannot distinguish between small features. The small feature can be seen and can be distinguish in SEM but not in AFM. The AFM only sees one single feature instead of two different features. We tried using smaller scan size. What parameters should be adjusted to be able to see the feature that we want. Does it have to do with the resolution of AFM?

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Bruker Employee

Can you please describe the sample you are tyring to image: what type of material are the features made of + which imaging mode and tip model are you using?

It is possible that the featues you are tyring to measure are smaller than the size of the tips, and you therefore have some tip/sample convolution effects. Using sharper tips or using optimized parameter settings can both help to overcome this. All depends however on your sample, so please provide osme more detail on this.

Best regards,

Peter

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replied on Fri, Nov 5 2010 11:51 AM

Hi Talara,

It would be benefical to have a few more information as already suggested by Peter. What AFM are you using and what mode are you operating the AFM in? What is the sample you are looking at and what are the features you are attempting to visualize? What tips are you using? What scan size do you refer to? What is your pixel resolution?

Thanks,

Stefan

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Hi Peter!

The first feature that we are trying to image in a sample is made up of plated CoNiFe and the the second feature is made up of Ru. Only the Ru is visible when we image the sample using D3100 Manual AFM. We are using an RTESP (MPP-11100-10) tip. We used the following settings in imaging the sample and also used tapping mode.

Scan Rate = 0.803Hz; Samples/Line = 512; Lines = 512; Slow Scan Axis = Enabled;

SPM Feedback = Amplitude; Integral Gain = 0.200; Proportional Gain = 0.400; Amplitude Setpoint = 1.697 V; Drive Frequency = 258.800kHz; Drive Amplitude = 945.1 mV

Microscope Mode = Tapping; Z Limit = 5.533 um; Engage Setpoint = 0.600; Bidirectional Scan = Disabled

You think this setting is good? What setting would you recommend for us to use in order to get a higher resolution image and to get a clearer image of the feature we want. Thank you for your reply.

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Top 500 Contributor
3 Posts
Points 36

Hi Stefan!

The first feature that we are trying to image in a sample is made up of plated CoNiFe and the the second feature is made up of Ru. Only the Ru is visible when we image the sample using D3100 Manual AFM. We are using an RTESP (MPP-11100-10) tip. We used the following settings in imaging the sample and also used tapping mode. The smallest scan size we used was 600nm.

Scan Rate = 0.803Hz; Samples/Line = 512; Lines = 512; Slow Scan Axis = Enabled;

SPM Feedback = Amplitude; Integral Gain = 0.200; Proportional Gain = 0.400; Amplitude Setpoint = 1.697 V; Drive Frequency = 258.800kHz; Drive Amplitude = 945.1 mV

Microscope Mode = Tapping; Z Limit = 5.533 um; Engage Setpoint = 0.600; Bidirectional Scan = Disabled

You think this setting is good? What setting would you recommend for us to use in order to get a higher resolution image and to get a clearer image of the feature we want. Thank you for your reply.

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replied on Mon, Nov 8 2010 11:11 AM

Hi Talara,

Thanks for the information. Your scanparameters do not look out of the ordinary. Some important questions remain, however, and that is what the scan size is that you are actually looking at, what the size of the features is that you are trying to resolve. It might help if you could just email us an image to look at. This might help us to get a better idea on what is going on: Peter.DeWolf@bruker-nano.com, stefan.kaemmer@bruker-nano.com.

Thanks,

Stefan

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