The Nanoscale World

3D MEMS Metrology with the Atomic Force Microscope


Wed, Jan 6 2010

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3D MEMS Metrology with the Atomic Force Microscope

Veeco Metrology Group, through its Digital Instruments and TM Microscopes divisions, offers several lines of scanning probe microscopes (SPM) capable of atomic force microscopy (AFM). Large sample stage AFMs can handle full-size MEMS wafers, and offer a range of automation options for the production fab. Small sample stage AFMs, with fewer automation options, are like their large sample stage counterparts in that they are highly modular. In this application note, the utility of the AFM for microelectromechanical system (MEMS) metrology is discussed in two separate case studies, which include mature, commercially-successful devices.

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