The Nanoscale World

AFM & Optical Microscopy

posted by Andrea Thoene
Mon, Sep 19 2011

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AFM & Optical Microscopy

This datasheet describes the NEOS – a high resolution surface inspection microscope.

NEOS combines AFM with a research grade upright optical microscope.


Application Areas for the NEOS:

  • Metallurgy
  • Coatings (on metal, glass, etc.)
  • Optical Industry (Glass, polymer for glasses and lenses)
  • Fibers
  • Micro Patterned Devices/Laser Ablation
  • Defects in SiC / sapphire LED substrate (not PSS!)
  • Defect inspection in general


NEOS users want to look at:

  • Defects
  • Patterned/structured sample


NEOS helps if

  • AFM area is hard to find
  • dark field or DIC are required
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