Kelvin probe force microscopy (KPFM), also called surface potential microscopy, has found broad applications, ranging from corrosion studies of alloys, photovoltaic effects on solar cells, and surface analysis. KPFM, together with conductive AFM, have been recognized as the two most used nanoscale electrical characterization tools, complementing each other. PeakForce KPFM provides a new level of accuracy and spatial resolution for KPFM measurements.