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I found some more, just in case somebody is interested as well http://surfacemetrology.org/ http://www.nist.gov/eeel/semiconductor/conference/ This might be handy as well http://www.conference-service.com/conferences/nanotechnology.html
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Hi, I tried to setup a 1D SPM Zoom in Tapping mode yesterday on an X3D running 6.26R5. But for some reason the captured survey image came out non planefitted, so that in the following PatRec step the image was just black. Did I miss something? I did the same on a Vx210 (same SW) a few weeks ago and it worked there. If you have any ideas please let me
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Hi all, I do have a customer who wants to publish a paper qualification of SWR and LER on waveguides using conventional AFM (Tapping), Veecos CD Mode and CD SEM technique. Where can they do that within Europe in 2010? Are there other ones than SPIE?
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Thank you. I can not find the document (could it be that I don't have access to Veeco Media - SW, Documents section?) I just have application notes, brochures. What I have is 'Impact of Sampling on Uncertainty: Semiconductor Dimensional Metrology Applications'.
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What experience have you made while measuring LER, LWR and SWR with a CD AFM in terms of choosing appropiate scan size and number of lines for a good resolution. Obviously we have to take the shape of the CD tip and the wavelength/frequency of the linewidthvariation into account. But how would you generally start? Resolution of 10nm per line? Is less
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Could somebody explain the SWR analysis in a little bit more detail? (is it the same math as surface roughness?) Does it use all data points between top and bottom threshold? Can I compensate with 2nd or 3rd order planefit for drift?
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I did measure LER on waveguides yesterday. A question came up Does 'Location' in LER Analysis refer to the top or bottom? Thank you for you help.
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Hi Sean, I got it to work, it was missing a folder within the UtilityRecipe path. Thank you Robert
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I need to check the analysis settings of a V6 TipQual recipe without actually opening the recipe? Means can I check the bag or wks files? My V6 Offline SW is setup as Hardware Simulation. I can enter realtime. The system.par points to the correct utility recipe path. But TQ button is still greyed out when I enter Tools-UtilityRecipes-TQ-Teach it states
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There is a Professor at the University in Dresden who is actually doing that on a self made benchtop tool with self made tips. I can forward his contact if you want.