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  • error of the X,Y offset?

    Hi All, We are trying to measure the distance between two features in Dimension ICON, sometimes the distance between them could be large ( around 50micron) so it will be time consuming and not accurate enough to just scan a large area ( since the maximum lines/sample we can use is 5120). So we are thinking to measure one feature first by a scanning
    Posted to SPM Digest (Forum) by lmign on Mon, Jul 18 2011
  • Re: Tips for oxidation?

    Hi Stephen Thank you for your reply. I could only find this manual online http://nanoscaleworld.bruker-axs.com/nanoscaleworld/media/p/1212.aspx Is this the one you are talking about? Thanks,
    Posted to SPM Digest (Forum) by lmign on Fri, Apr 8 2011
  • Tips for oxidation?

    Hi All, We would like to do the local oxidation on Veeco icon AFM, what kind of tips would you suggest? Thanks, Yiming
    Posted to SPM Digest (Forum) by lmign on Thu, Apr 7 2011
  • Re: large area scan with AFM

    Hello Sean, Thanks for the reply, So the Depth automated AFM is a different system from the Dimension icon? Yiming
    Posted to SPM Digest (Forum) by lmign on Mon, Dec 6 2010
  • Re: large area scan with AFM

    Hi Steve, Thanks for the reply! yes, I will try the 5000x5000 pixels scanning, hope this can work for us! Thanks! Yiming
    Posted to SPM Digest (Forum) by lmign on Mon, Dec 6 2010
  • large area scan with AFM

    Hi All, I'm trying to scan a large area ( probably 200micron x 200 micron) in order to get distance between some marks on my wafer. As far as I know, please correct me if I'm wrong, the largest area we could scan at a time is 100micron x 100 micron and it will sacrifice the lateral resolution, so I'm thinking to have multiple scanning and
    Posted to SPM Digest (Forum) by lmign on Thu, Dec 2 2010
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