The Nanoscale World

Calibration Standards: electrical

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posted on Thu, Jan 7 2010 9:24 PM

This talk of calibration standards has brought up another question- where to get electrical reference standards for techniques such as scanning

spreading resistance (SSRM) or scanning capacitance (SCM)?

I'm talking about a stack of layers of known doping concentration and thicknesses of epitaxially grown silicon, usually set up as a sequence of

increasing or decreasing dopant concentration.

We have some custom made samples, but I'm wondering if anybody has a commercial source?

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Top 75 Contributor
12 Posts
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Suggested by Andres

Hi we have found some calibrated samples from IMEC

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Top 10 Contributor
75 Posts
Points 3,652

Thanks Andres

Here's a link to the specific page with more information:


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Top 100 Contributor
9 Posts
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Are there any samples that can be used as electrical standards for scanning in liquids? 

Tejasvi Parupudi


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