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Shivani Sharma † ‡ , Haider I. Rasool † , Viswanathan Palanisamy § , Cliff Mathisen , Michael Schmidt , David T. Wong and James K. Gimzewski † ‡ ¶ * † Department of Chemistry and Biochemistry, University of California, Los Angeles, California 90095 ‡ California NanoSystems Institute, University
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Soft Slope Smoothing filters the output of the 2DDS filter. It adds a degree of stability to the sample slope calculation.
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2D Data Smoothing doesn’t effect noise in images, unless you set it so low that the scan algorithm fails to correctly calculate the sample slope. A lower filter value allows the calculated slope to change more rapidly, which is important in narrow spaces.
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Enabling the Tip Fly Limit allows additional MicroSteps when the tip starts sticking to the sample. The idea is that any time the Tip is very far away from the sample (in response to tip sticking) the DSP will command <Tip Fly Limit> additional MicroSteps. It speeds up scanning, particularly on parts of the sample where the tip is sticking.
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My Understanding: This parameters determines when the servo changes direction on flat, can be left at 0.2 or 0.3? Where do I see its effect? I guess setting it to change direction at 45deg (I guess that means 0.2) is the best? What is the formula behind it?
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My understanding: The soft slope smoothing is a filter for calculing sample slope, unit nm, how can I see its affect? What is the formula behind it? Set it lower (1nm) in small trenches?
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My understanding: 2D data smoothing is a filter for calculating sample slope, unit nm, need to set lower in smaller trenches (about 5), can be left at default 7.5 at VPS, how does it or can it affect noise in images -> I mean if the scanner measures the sidewall noisy this filter wont do much? at least I can not notice it. What it the formula behind
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My understanding is the follow ing: Tip fly limit controls when the DSP takes a data point on flat and is directly hooked to micro step size, (e.g. µm step size 2, tip fly limit 2 = data point taken every 4microns on flat. Is this correct? What happens on sidewalls?
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While profiling on a DAFP I keep tripping HPC while profiling up a 250nm step feature. Increasing igain from 0.3 - 2 does not seem to help. Using standard tapping parms elsewhere. Other advice?