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Hi Robert - In both V6 and V7, the measurement location for LER is relative to the top of the feature. For example, if you have the location set to 10% and the line feature is 100nm tall, the measurement location will be 10nm down from the top of the line. Cheers, Sean
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In addition I find that it's sometimes best to have Tip Bottom Cutoff set to the same height as the tallest feature of interest. While this might not eliminate all artifacts in the post extraction image it should mean that the features you care about are properly resolved. Jason.