Showing related tags and posts across the entire site.
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Hi Robert - In both V6 and V7, the measurement location for LER is relative to the top of the feature. For example, if you have the location set to 10% and the line feature is 100nm tall, the measurement location will be 10nm down from the top of the line. Cheers, Sean
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Normal 0 false false false MicrosoftInternetExplorer4 Atomic force microscopy (AFM), on the other hand, represents an excellent solution for advanced process metrology. The Digital Instruments Dimension™ X3D Automated Atomic Force Microscope from Veeco (see Figure 1), is able to deliver TEM-like...
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Chrome-on-glass photomask - looking for re-entrant profiles and overhang of the chrome cap.
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Soft Slope Smoothing filters the output of the 2DDS filter. It adds a degree of stability to the sample slope calculation.
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2D Data Smoothing doesn’t effect noise in images, unless you set it so low that the scan algorithm fails to correctly calculate the sample slope. A lower filter value allows the calculated slope to change more rapidly, which is important in narrow spaces.
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My Understanding: This parameters determines when the servo changes direction on flat, can be left at 0.2 or 0.3? Where do I see its effect? I guess setting it to change direction at 45deg (I guess that means 0.2) is the best? What is the formula behind it?
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My understanding: The soft slope smoothing is a filter for calculing sample slope, unit nm, how can I see its affect? What is the formula behind it? Set it lower (1nm) in small trenches?
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My understanding: 2D data smoothing is a filter for calculating sample slope, unit nm, need to set lower in smaller trenches (about 5), can be left at default 7.5 at VPS, how does it or can it affect noise in images -> I mean if the scanner measures the sidewall noisy this filter wont do much? at...