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Hi Robert - In both V6 and V7, the measurement location for LER is relative to the top of the feature. For example, if you have the location set to 10% and the line feature is 100nm tall, the measurement location will be 10nm down from the top of the line. Cheers, Sean
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Chrome-on-glass photomask - looking for re-entrant profiles and overhang of the chrome cap.
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Soft Slope Smoothing filters the output of the 2DDS filter. It adds a degree of stability to the sample slope calculation.
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2D Data Smoothing doesn’t effect noise in images, unless you set it so low that the scan algorithm fails to correctly calculate the sample slope. A lower filter value allows the calculated slope to change more rapidly, which is important in narrow spaces.
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My Understanding: This parameters determines when the servo changes direction on flat, can be left at 0.2 or 0.3? Where do I see its effect? I guess setting it to change direction at 45deg (I guess that means 0.2) is the best? What is the formula behind it?
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My understanding: The soft slope smoothing is a filter for calculing sample slope, unit nm, how can I see its affect? What is the formula behind it? Set it lower (1nm) in small trenches?
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My understanding: 2D data smoothing is a filter for calculating sample slope, unit nm, need to set lower in smaller trenches (about 5), can be left at default 7.5 at VPS, how does it or can it affect noise in images -> I mean if the scanner measures the sidewall noisy this filter wont do much? at...
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My understanding is the follow ing: Tip fly limit controls when the DSP takes a data point on flat and is directly hooked to micro step size, (e.g. µm step size 2, tip fly limit 2 = data point taken every 4microns on flat. Is this correct? What happens on sidewalls?
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In addition I find that it's sometimes best to have Tip Bottom Cutoff set to the same height as the tallest feature of interest. While this might not eliminate all artifacts in the post extraction image it should mean that the features you care about are properly resolved. Jason.
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What is the difference between the "Tip Servo Distance Limit" and the "Lateral Servo Limit"?